Thermocatalytic gas sensor based on palladium nanoparticles synthesized by spark ablation
DOI:
https://doi.org/10.47813/2782-2818-2022-2-4-0501-0519Keywords:
thermocatalytic gas sensor, spark discharge, palladium based nanoparticles, functional inks, microplotter printingAbstract
We have demonstrated the possibility of fabricating thermocatalytic gas sensors with a catalytic layer based on palladium nanoparticles synthesized by spark ablation using palladium ingots with a purity of 99.96 wt. % as a feed material. The sensor was implemented using a commercially available MEMS platform based on thin glass ceramic membrane 50–60 µm thick with an integrated microheater. The formulated functional ink comprising synthesized nanoparticles with a concentration of about 25 wt. % was deposited on the opposite to the microheater side of a membrane with the use of SonoPlot GIX Microplotter II printing equipment. The obtained structure was annealed at a temperature of 400 °C to remove the organic binder from the dry residue of the deposited ink. As a result, the uniform layer of catalytically active material with a thickness of about 3 μm was obtained on the membrane surface. The sensor implemented based on two MEMS platforms (one with a catalytic layer, the second one without a layer) placed in the Wheatstone bridge circuit demonstrates high sensitivity to methane (50 mV per 1% of methane) at a total power consumption of about 350 mW. The achieved characteristics are comparable with that of commercial sensors manufactured by Figaro USA Inc., SGX Sensortech, Zhengzhou Winsen Electronics Technology Co.
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Copyright (c) 2022 I. S. Vlasov, D. V. Kornyushin, E. I. Kameneva, I. A. Volkov
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